ZONDA真空六自由度定位平台是一种全新的高性能六自由度系统,可满足对高精度、稳定性、精度、重载和大行程的应用要求。
ZONDA真空六自由度定位平台设计用于定位高达 400 kg 的有效载荷,分辨率仅为 0.1 µm,XY 方向为 400 mm,Z 方向为 300 mm,Rx、Ry 和 Rz 三个旋转方向为 40°,具有出色的行程。
ZONDA真空六自由度定位平台具有无与伦比的精度和热稳定性特性,这要归功于具有极低 CTE(热膨胀系数)的集成因瓦组件、作为标准集成在执行器中的线性绝对编码器以及特别刚性接头的设计。
ZONDA真空六自由度定位平台可用于任何方向:垂直、水平、倒置……
ZONDA真空六自由度定位平台产品特点:采用步进电机,最大负载500KG,分辨率0.1urad,重复定位精度0.5um,超高稳定性,大行程,真空兼容。
ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.
Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.
ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.
ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…